Let me know when you have any questions.
Ruud Niesen
+31 85 080 5944 - Option 3
ruud@photonmission.com
TORRENT Spray Solvent Tool (SST)
- Low exhaust and facilities requirements
- Low chemical consumption
- Low DIW consumption
- Higher initial costs vs wet bench
TORRENT, our latest SEMITOOL Spray Solvent Tool, is the platform of choice for solvent applications. We are the product line owner for SEMITOOL batch systems since 2012 and designed TORRENT utilizing industry proven SEMTOOL batch spray technology. With the latest software enhancements and compact, maintenance-friendly system configurations for optimal performance, TORRENT delivers repeatable, uniform process results safely and at a low CoO. The latest in the line of legendary SEMITOOL Spray Solvent Tools, TORRENT is available in 25 or 50 wafer configurations. Process Applications: * Polymer removal * Resist strip * Post etch residue removal * Solvent cleans * Post-Dice clean * Metal Lift-off * Flux removal
SHELLBACK TORRENT SST Spray Solvent Tool, the most intelligent spray batch system in the industry
TORRENT Spray Acid Tool (SAT)
- Low cost of ownership
- Eco-Clean Ozone
- Flexible process
- Higher initial costs vs wet bench
SHELLBACK’s SEMITOOL TORRENT Spray Acid Tool (SAT) is the world’s most advanced spray batch tool for semiconductor wet etch and cleans processes. Featuring proprietary independent flow control nozzles, wafer-to-wafer repeatability, sealed PVDF tanks, Smart Parts intelligence, and more, the Torrent defines the new normal in wet wafer processing applications for semiconductor manufacturing, advanced packaging, optoelectronics, MEMS and compound semiconductors. Add HydrOzone™ to your spray acid tool for big savings on chemicals while also addressing climate innitiatives. See more on our award-winning HydrOzone process. Process Applications: * Post etch clean * Pre diffusion clean * Post CMP clean * Post ash clean * UBM etch * Metal etch * BOE etch * Oxide etch * GaAs etch & clean * Cu etch * RDL etch * Glass etch * Wafer thinning * Si etch
SHELLBACK TORRENT SST Spray Solvent Tool, the most intelligent spray batch system in the industry
TORRENT ECO-Clean Ozone Tool (SOT)
- Zero to 7ml chemical consumption/run
- Reduce DIW consumption up to 85%
- Low exhaust and facilities requirements
- Higher initial costs vs wet bench
SHELLBACK’s SEMITOOL TORRENT ECO-Clean™ Spray Ozone Tool (SOT) offers field-proven technology to provide high throughput capability with dramatically lower chemical consumption and ownership costs. Our award-winning Hydrozone and Flurozone processes offer an economical alternative to traditional H2SO4/H2O2 use to provide fast, affordable and efficient photo resist strip, photo rework, or organic contamination removal. SEMITOOL pioneered this award winning ozone batch cleaning process from its introduction in 2000. This proven technology provides a long history of performance, so you don’t have to worry about creating & testing inexperienced solutions. Process Applications: * Photoresist strip * Post ash clean * Post etch residue clean * Surface preparation FEOL and BEOL
HydrOzone - How It Works
HF Vapor Tool (HFV)
- Low exhaust and facilities requirements
- Low chemical consumption
- Low DIW consumption
SEMITOOL HF Vapor Tool delivers SHELLBACK patented HF Vapor process. The on-axis, HDPE, process chamber can accommodate up to 25 wafers in a vertical orientation. Process Applications: * Spring release * Selective oxide etch * Hydrophobic termination
SHELLBACK TORRENT SST Spray Solvent Tool, the most intelligent spray batch system in the industry
MERCURY+ Batch Spray Clean Etch
- High throughput batch cleaning
- Reliable, low cost of ownership
- Proven platform for 100mm to 200mm
SHELLBACK is now the new product line owner of the iconic FSI MERCURY™ / MERCURY™+ product line. MERCURY+ batch spray clean etch systems provide proven high speed spray batch processing for 100 to 200mm wafers, perfect for fabs looking for high throughput, low cost-of ownership, and easy size change capabilities. The speed and versatility of MERCURY+ makes it ideal for emerging markets such as Power Devices, MEMS & Sensors, and many more. Process Applications: * SPM, dHF, SC1, SC2 cleans * Post-etch and post-ash cleans * Aqueous photoresist strip applications * Wet etch/strip of metal films for silicide * BEOL, Post cleans using DSP, DSP+
Official partner of SHELLBACK Semiconductor Technology
SHELLBACK Semiconductor Technology - launched in 2021, the company sets a new standard by offering both front-end manufacturing systems and back-end packaging and inspection systems to enable customer success across the industry. SHELLBACK Semiconductor Technology builds on OEM Group’s reputation as a supplier of iconic proprietary technologies to the industry’s most critical fabs, as well as Rite Track’s peerless track record for product support and customer service. With one of the industry’s largest installed bases of equipment at over 800+ customers world-wide, SHELLBACK offers proprietary products including SEMITOOL & FSI MERCURY / MERCURY+ batch spray, SVG/RITE TRACK Coath Develop, and SEMITOOL STORM Carrier Cleaning.