Photon Mission B.V.

Bijsterhuizen 2527
6604 LM Wijchen
The Netherlands

SRD – Spin Rinse Dry

SRD - Spin Rinse Dry

Need advice to find the optimal configuration? I’m happy to help!

Ruud Niesen

+31 85 080 5944 - Option 3

ruud@photonmission.com

SEMITOOL Spin Rinse Dryer

  • Particle Guarantee <20 adders @ 0.2um per 8” wafer
  • Factory automation and remote data access
  • Removes static charge in chamber

SHELLBACK introduces the next-generation SEMITOOL Spin Rinse Dryer (SRD) with advanced controls that enhance ease-of-use, improves monitoring and management capabilities, and reduces operating costs. The SEMITOOL IP was acquired in 2011 and SHELLBACK has continually added quality and reliability upgrades to its best-in-class SRD product the world standard for high-performance cleaning, rinsing, and drying with more than 25,000 units currently in use. A major engineering design upgrade of its Semitool Spin Rinse Dryer, a platform for removing residual chemicals from semiconductor substrates and other materials such as optical lenses. The new SRD800 series features several upgrades, including a robust Windows OS, advanced automation, an intuitive GUI, and patent-pending SmartParts™uptime technology. Along with improved ergonomic functionality, the many system upgrades enhance management capabilities and gives users the ability to track and control operations in real time in order to significantly reduce overall cost of ownership.

SHELLBACK Spin Rinse Dryer (SRD) - The best SRD on the planet - even better

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Official partner of SHELLBACK Semiconductor Technology

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SHELLBACK Semiconductor Technology - launched in 2021, the company sets a new standard by offering both front-end manufacturing systems and back-end packaging and inspection systems to enable customer success across the industry. SHELLBACK Semiconductor Technology builds on OEM Group’s reputation as a supplier of iconic proprietary technologies to the industry’s most critical fabs, as well as Rite Track’s peerless track record for product support and customer service. With one of the industry’s largest installed bases of equipment at over 800+ customers world-wide, SHELLBACK offers proprietary products including SEMITOOL & FSI MERCURY / MERCURY+ batch spray, SVG/RITE TRACK Coath Develop, and SEMITOOL STORM Carrier Cleaning.